Mechanics of Smart Structures

Mechanics of Smart Structures

Numerical analysis of the effects of base and electrode dimensions on the electrostatic response of the micromirrors using square and circular electrodes

Document Type : Original Article

Authors
Farhad Rezvannezhad 1
Ali Amiri Jaghargh
Mazdak Radmalekshahi 2
1 Razi University, Kermanshah, Iran
2 Department of Electrical Engineering, Razi University, Kermanshahو ]قشد
10.30511/jmms.2026.2089621.1046
Abstract
In this study, the effect of the geometric dimensions of the spiral-shaped base of a micromirror on its maximum displacement and response time under electrostatic excitation was numerically investigated. The influence of electrode size and shape was also analyzed. An array of 16 square and circular electrodes was used, with a potential difference of one volt applied. Results indicate that increasing the handle length from 400 to 440 μm leads to a 17% and 15% rise in displacement and response time for square electrodes, and 33% and 12% for circular electrodes. When the handle width increases from 10 to 30 μm, displacement and response time decrease by 59% and 30% for square electrodes, and by 64% and 25% for circular ones. Overall, using a square electrode instead of a circular one yields greater maximum displacement and shorter response time. Moreover, by increasing the electrode side or diameter from 40 to 80 μm, depending on the base dimensions, the micromirror’s maximum displacement increases by approximately two to three times.
Keywords
Micromirror
Electrostatic Force
Micro Electro Mechanical Device
MEMS
Mechanics of Smart Structures
Volume 2, Issue 1
Winter 2025